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Frontiers in preparation of Si3N4 powder by radio frequency plasma chemical vapor deposition
Hong, R. Y.; Zheng, G. L.; Li, H. Z.; Ding, J. M.
1997
Conference NameInternational Symposium on Processing and Handling of Powders and Dusts, at the Annual Meeting of the Minerals-Metals-and-Materials-Society
Pages13-22
Conference DateFEB 09-13, 1997
Conference PlaceORLANDO, FL
PublisherMinerals, Metals & Materials Soc
Abstract

Preparing ultrafine silicon nitride powder on a large scale is very important because of the unique properties of silicon nitride ceramic. Different kinds of methods for synthesizing ultrafine silicon nitride powder are reviewed briefly. The radio frequency plasma chemical vapor deposition (RFPCVD) method and its characteristics are given. It is pointed out that mathematical models are very useful for studying: the RF thermal plasma generator and RFPCVD reactor, and there are three kinds of models used nowadays: the thermodynamic models, hydrodynamic models and aerosol dynamic models which have respective features. Research work on thermodynamic: hydrodynamic, aerosol dynamic and technological studies for preparing ultrafine silicon nitride powder are given in detail. At last, six important research topics for the studies on RFPCVD technology are discussed.

KeywordSilicon Nitride Ultrafine Powder Radio Frequency Plasma Chemical Vapor Deposition
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Indexed ByISTP
Language英语
Document Type会议论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/11126
Collection研究所(批量导入)
Recommended Citation
GB/T 7714
Hong, R. Y.,Zheng, G. L.,Li, H. Z.,et al. Frontiers in preparation of Si3N4 powder by radio frequency plasma chemical vapor deposition[C]:Minerals, Metals & Materials Soc,1997:13-22.
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