CAS OpenIR  > 多相复杂系统国家重点实验室
Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts
Ren, Wenfeng1,2; Wang, Yanhong1; Zhang, Zailei1; Tan, Qiangqiang1; Zhong, Ziyi3; Su, Fabing1
2016
发表期刊APPLIED SURFACE SCIENCE
ISSN0169-4332
卷号360期号:JAN页码:192-197
摘要Despite the promising application of patterned Si wafers (PSWs) in electrochemistry and photochemistry, the simple and environment-friendly fabrication of these PSWs is still a great challenge. Herein, we report a novel method for fabrication of PSWs via Rochow reaction, which is commonly used to produce organosilane monomers for synthesizing organosilane products in chemical industry. In this reaction, commercial Si wafers (SWs) reacted with gas CH3Cl over patterned various Cu-based catalyst to create regular patterns. PSWs were obtained after removal of Cu compounds followed with facile post treatment. Because of simplicity, low-cost and low-toxicity of this approach, the manufacture of PSWs on an industrial scale is highly possible, which can be realized by integrating the organosilane synthesis process and controlling the reaction conditions. (C) 2015 Elsevier B.V. All rights reserved.
关键词Si Wafers Direct-pattern Rochow Reaction Copper Catalysts Ch3cl
文章类型Article
WOS标题词Science & Technology ; Physical Sciences ; Technology
DOI10.1016/j.apsusc.2015.10.233
收录类别SCI
语种英语
关键词[WOS]SOLAR-CELLS ; FABRICATION ; NANOWIRES ; LITHOGRAPHY ; LITHIUM ; SYSTEM ; ARRAYS ; MASK
WOS研究方向Chemistry ; Materials Science ; Physics
WOS类目Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
项目资助者National Natural Science Foundation of China(51272252 ; Hundred Talents Program of the Chinese Academy of Sciences ; 51402302 ; 51402299)
WOS记录号WOS:000366591200024
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.ipe.ac.cn/handle/122111/20180
专题多相复杂系统国家重点实验室
作者单位1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.ASTAR, Inst Chem Engn & Sci, Jurong Isl 627833, Singapore
推荐引用方式
GB/T 7714
Ren, Wenfeng,Wang, Yanhong,Zhang, Zailei,et al. Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts[J]. APPLIED SURFACE SCIENCE,2016,360(JAN):192-197.
APA Ren, Wenfeng,Wang, Yanhong,Zhang, Zailei,Tan, Qiangqiang,Zhong, Ziyi,&Su, Fabing.(2016).Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts.APPLIED SURFACE SCIENCE,360(JAN),192-197.
MLA Ren, Wenfeng,et al."Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts".APPLIED SURFACE SCIENCE 360.JAN(2016):192-197.
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Facile patterning si(2638KB)期刊论文出版稿开放获取CC BY-NC-SA浏览 请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Ren, Wenfeng]的文章
[Wang, Yanhong]的文章
[Zhang, Zailei]的文章
百度学术
百度学术中相似的文章
[Ren, Wenfeng]的文章
[Wang, Yanhong]的文章
[Zhang, Zailei]的文章
必应学术
必应学术中相似的文章
[Ren, Wenfeng]的文章
[Wang, Yanhong]的文章
[Zhang, Zailei]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。