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化学气相沉积法制备纳微ZnO的实验和模拟研究进展
田会娟; 郝斌; 徐俊波; 田亚峻; 温浩
2016
Source Publication材料导报
Issue1Pages:"33-40"
Abstract

纳/微氧化锌材料性能优良,用途广泛,制备方法较多,其中化学气相沉积法(CVD)是较常用的方法之一。详细介绍了CVD方法制备纳米氧化锌的主要影响因素,概述了计算流体动力学(CFD)模拟在化学气相沉积法方面的应用和研究现状,并指出应该采用实验研究和计算模拟相结合的方法进行研究,利用计算模拟指导实验,从而实现纳微结构的可控生长。

Keyword纳微结构氧化锌 化学气相沉积 局部气氛 数值模拟
Document Type期刊论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/22242
Collection研究所(批量导入)
Recommended Citation
GB/T 7714
田会娟,郝斌,徐俊波,等. 化学气相沉积法制备纳微ZnO的实验和模拟研究进展[J]. 材料导报,2016(1):"33-40".
APA 田会娟,郝斌,徐俊波,田亚峻,&温浩.(2016).化学气相沉积法制备纳微ZnO的实验和模拟研究进展.材料导报(1),"33-40".
MLA 田会娟,et al."化学气相沉积法制备纳微ZnO的实验和模拟研究进展".材料导报 .1(2016):"33-40".
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