CAS OpenIR
Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors
Wang, Ying1,2; Liu, Chengyao1; Wang, Zhou1; Song, Zhiwei3; Zhou, Xinyuan1; Han, Ning1,2; Chen, Yunfa1,2
2019
Source PublicationSENSORS AND ACTUATORS B-CHEMICAL
ISSN0925-4005
Volume278Pages:28-38
AbstractHere, heterostructured Au/SnO2:NiO thin films are fabricated by sputtering SnO2:NiO target onto the self-assembled Au nanoparticle (NPs, diameter similar to 9.5 nm) arrays and then activated by H-2 annealing. Compared with the SnO2 and SnO2:NiO thin film counterparts, the 20 nm thick Au/SnO2:NiO film shows the highest NO2 sensing performance after activated at optimized temperature of 500 degrees C, with high response of similar to 185 to 5 ppm NO2, low detection limit of similar to 50 ppb, high selectivity, good stability and also low sensor-to-sensor variation of < 15%. The gas sensing property enhancement could not only be attributed to catalytic role of the AuNPs, but also to the effective Schottky barrier and p-n junction formation between Au, SnO2 and NiO, which is verified by the relatively higher Fermi level of similar to 4.56 eV compared with those of 4.1-4.3 eV as measured by the ultraviolet photoelectron spectroscopy. Furthermore, this method is of generality to effectively enhance the electron transfer in other sensing materials like pure SnO2 and WO3, showing the promising potency of this MicroElectrical-Mechanical System (MEMS) compatible heterostucture fabrication method in wafer-scale gas sensor production with high sensitivity, selectivity and good consistency towards low concentration gas detection such as ppb-level NO2.
KeywordAu/SnO2:NiO thin films Heterostructure Self-assembly NO2 gas detection Thermal annealing Fermi level
DOI10.1016/j.snb.2018.09.074
Language英语
WOS KeywordCORE-SHELL NANORODS ; SENSING PROPERTIES ; ROOM-TEMPERATURE ; PERFORMANCE ; NANOSTRUCTURES ; NANOCOMPOSITES ; FABRICATION ; NANOWIRES ; MICROSTRUCTURES ; HETEROJUNCTION
Funding ProjectNational Key R&D Program of China[2016YFC0207100] ; Guangdong Innovative and Entrepreneurial Research Team Program[2014ZT05C146] ; Guangdong Innovative and Entrepreneurial Research Team Program[20150317025954531] ; State Key Laboratory of Multiphase Complex Systems[MPCS-2014-C-01]
WOS Research AreaChemistry ; Electrochemistry ; Instruments & Instrumentation
WOS SubjectChemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
Funding OrganizationNational Key R&D Program of China ; Guangdong Innovative and Entrepreneurial Research Team Program ; State Key Laboratory of Multiphase Complex Systems
WOS IDWOS:000447620900005
PublisherELSEVIER SCIENCE SA
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/26265
Collection中国科学院过程工程研究所
Corresponding AuthorHan, Ning; Chen, Yunfa
Affiliation1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
2.Chinese Acad Sci, Inst Urban Environm, Ctr Excellence Reg Atmospher Environm, Xiamen 361021, Peoples R China
3.Chinese Acad Sci, Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Wang, Ying,Liu, Chengyao,Wang, Zhou,et al. Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors[J]. SENSORS AND ACTUATORS B-CHEMICAL,2019,278:28-38.
APA Wang, Ying.,Liu, Chengyao.,Wang, Zhou.,Song, Zhiwei.,Zhou, Xinyuan.,...&Chen, Yunfa.(2019).Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors.SENSORS AND ACTUATORS B-CHEMICAL,278,28-38.
MLA Wang, Ying,et al."Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors".SENSORS AND ACTUATORS B-CHEMICAL 278(2019):28-38.
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