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A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts | |
Song, Miao1,2; Yang, Yafeng1,3; Guo, Junjie1,2; Xiang, Maoqiao1; Zhu, Qingshan1,2; Ge, Yu1 | |
2019-10-15 | |
Source Publication | CERAMICS INTERNATIONAL
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ISSN | 0272-8842 |
Volume | 45Issue:15Pages:18265-18272 |
Abstract | High quality TiN coated 316L stainless steel can hardly be fabricated by the traditional chemical vapor deposition (CVD) methods because of the formation of HCl (g) corrosive byproduct and phase transformation at high deposition temperature. To address the problem, herein, for the first time a novel TiCl2 precursor is proposed to fabricate TiN coating on 316L substrate in N-2 atmosphere at low temperature. The idea is based on that metastable TiCl2 can release fresh Ti atoms by its disproportionation reaction, and then the fresh Ti atoms react easily with N-2 to form TiN coating at low temperature without HCl byproduct. The reaction path, interface reaction, and performance of the TiN coating were investigated. The optimized nanograin TiN (45 nm) coating was successfully fabricated on 316L at 750 degrees C and it exhibited excellent corrosion resistance. |
Keyword | Chemical Vapor Deposition Metastable Precursor Nanograin Size Tin coaTing |
DOI | 10.1016/j.ceramint.2019.06.037 |
Language | 英语 |
WOS Keyword | Chemical-vapor-deposition ; Mechanical-properties ; Thin-films ; Cvd ; Microstructure ; Behavior ; Ticl4 |
Funding Project | National Natural Science Foundation of China[11805227] ; National Natural Science Foundation of China[21736010] ; DNL Cooperation Fund, CAS[DNL180304] |
WOS Research Area | Materials Science |
WOS Subject | Materials Science, Ceramics |
Funding Organization | National Natural Science Foundation of China ; DNL Cooperation Fund, CAS |
WOS ID | WOS:000483454200012 |
Publisher | ELSEVIER SCI LTD |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.ipe.ac.cn/handle/122111/30653 |
Collection | 中国科学院过程工程研究所 |
Corresponding Author | Xiang, Maoqiao; Zhu, Qingshan |
Affiliation | 1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Sch Chem Engn, Beijing 100049, Peoples R China 3.Dalian Natl Lab Clean Energy, Dalian 116023, Peoples R China |
Recommended Citation GB/T 7714 | Song, Miao,Yang, Yafeng,Guo, Junjie,et al. A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts[J]. CERAMICS INTERNATIONAL,2019,45(15):18265-18272. |
APA | Song, Miao,Yang, Yafeng,Guo, Junjie,Xiang, Maoqiao,Zhu, Qingshan,&Ge, Yu.(2019).A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts.CERAMICS INTERNATIONAL,45(15),18265-18272. |
MLA | Song, Miao,et al."A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts".CERAMICS INTERNATIONAL 45.15(2019):18265-18272. |
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