A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts

doi:10.1016/j.ceramint.2019.06.037

CAS OpenIR

	A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts
	Song, Miao 1,2; Yang, Yafeng 1,3; Guo, Junjie 1,2; Xiang, Maoqiao 1; Zhu, Qingshan 1,2; Ge, Yu 1
	2019-10-15
Source Publication	CERAMICS INTERNATIONAL
ISSN	0272-8842
Volume	45 Issue:15 Pages:18265-18272
Abstract	High quality TiN coated 316L stainless steel can hardly be fabricated by the traditional chemical vapor deposition (CVD) methods because of the formation of HCl (g) corrosive byproduct and phase transformation at high deposition temperature. To address the problem, herein, for the first time a novel TiCl2 precursor is proposed to fabricate TiN coating on 316L substrate in N-2 atmosphere at low temperature. The idea is based on that metastable TiCl2 can release fresh Ti atoms by its disproportionation reaction, and then the fresh Ti atoms react easily with N-2 to form TiN coating at low temperature without HCl byproduct. The reaction path, interface reaction, and performance of the TiN coating were investigated. The optimized nanograin TiN (45 nm) coating was successfully fabricated on 316L at 750 degrees C and it exhibited excellent corrosion resistance.
Keyword	Chemical Vapor Deposition Metastable Precursor Nanograin Size Tin coaTing
DOI	10.1016/j.ceramint.2019.06.037
Language	英语
WOS Keyword	Chemical-vapor-deposition ; Mechanical-properties ; Thin-films ; Cvd ; Microstructure ; Behavior ; Ticl4
Funding Project	National Natural Science Foundation of China[11805227] ; National Natural Science Foundation of China[21736010] ; DNL Cooperation Fund, CAS[DNL180304]
WOS Research Area	Materials Science
WOS Subject	Materials Science, Ceramics
Funding Organization	National Natural Science Foundation of China ; DNL Cooperation Fund, CAS
WOS ID	WOS:000483454200012
Publisher	ELSEVIER SCI LTD
Citation statistics	Cited Times:4[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.ipe.ac.cn/handle/122111/30653
Collection	中国科学院过程工程研究所
Corresponding Author	Xiang, Maoqiao; Zhu, Qingshan
Affiliation	1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Sch Chem Engn, Beijing 100049, Peoples R China 3.Dalian Natl Lab Clean Energy, Dalian 116023, Peoples R China
Recommended Citation GB/T 7714	Song, Miao,Yang, Yafeng,Guo, Junjie,et al. A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts[J]. CERAMICS INTERNATIONAL,2019,45(15):18265-18272.
APA	Song, Miao,Yang, Yafeng,Guo, Junjie,Xiang, Maoqiao,Zhu, Qingshan,&Ge, Yu.(2019).A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts.CERAMICS INTERNATIONAL,45(15),18265-18272.
MLA	Song, Miao,et al."A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts".CERAMICS INTERNATIONAL 45.15(2019):18265-18272.

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