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A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts
Song, Miao1,2; Yang, Yafeng1,3; Guo, Junjie1,2; Xiang, Maoqiao1; Zhu, Qingshan1,2; Ge, Yu1
2019-10-15
Source PublicationCERAMICS INTERNATIONAL
ISSN0272-8842
Volume45Issue:15Pages:18265-18272
Abstract

High quality TiN coated 316L stainless steel can hardly be fabricated by the traditional chemical vapor deposition (CVD) methods because of the formation of HCl (g) corrosive byproduct and phase transformation at high deposition temperature. To address the problem, herein, for the first time a novel TiCl2 precursor is proposed to fabricate TiN coating on 316L substrate in N-2 atmosphere at low temperature. The idea is based on that metastable TiCl2 can release fresh Ti atoms by its disproportionation reaction, and then the fresh Ti atoms react easily with N-2 to form TiN coating at low temperature without HCl byproduct. The reaction path, interface reaction, and performance of the TiN coating were investigated. The optimized nanograin TiN (45 nm) coating was successfully fabricated on 316L at 750 degrees C and it exhibited excellent corrosion resistance.

KeywordChemical Vapor Deposition Metastable Precursor Nanograin Size Tin coaTing
DOI10.1016/j.ceramint.2019.06.037
Language英语
WOS KeywordChemical-vapor-deposition ; Mechanical-properties ; Thin-films ; Cvd ; Microstructure ; Behavior ; Ticl4
Funding ProjectNational Natural Science Foundation of China[11805227] ; National Natural Science Foundation of China[21736010] ; DNL Cooperation Fund, CAS[DNL180304]
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Ceramics
Funding OrganizationNational Natural Science Foundation of China ; DNL Cooperation Fund, CAS
WOS IDWOS:000483454200012
PublisherELSEVIER SCI LTD
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/30653
Collection中国科学院过程工程研究所
Corresponding AuthorXiang, Maoqiao; Zhu, Qingshan
Affiliation1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Sch Chem Engn, Beijing 100049, Peoples R China
3.Dalian Natl Lab Clean Energy, Dalian 116023, Peoples R China
Recommended Citation
GB/T 7714
Song, Miao,Yang, Yafeng,Guo, Junjie,et al. A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts[J]. CERAMICS INTERNATIONAL,2019,45(15):18265-18272.
APA Song, Miao,Yang, Yafeng,Guo, Junjie,Xiang, Maoqiao,Zhu, Qingshan,&Ge, Yu.(2019).A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts.CERAMICS INTERNATIONAL,45(15),18265-18272.
MLA Song, Miao,et al."A new precursor for fabricating TiN coating on 316L stainless steel at low temperature without corrosive byproducts".CERAMICS INTERNATIONAL 45.15(2019):18265-18272.
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