Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors
Tong,Weiguang1,2; Wang,Ying3; Bian,Yuzhi1; Wang,Anqi1; Han,Ning1,4; Chen,Yunfa1,4
Source PublicationNanoscale Research Letters
AbstractAbstractNowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO2:NiO networks were successfully fabricated by sputtering SnO2:NiO target onto the etched self-assembled triangle polystyrene (PS) microsphere arrays and then ultrasonically removing the PS microsphere templates in acetone. The optimum line width (~?600?nm) and film thickness (~?50?nm) of SnO2:NiO networks were obtained by varying the plasma etching time and the sputtering time. Then, thermal annealing at 500?°C in H2 was implemented to activate and reorganize the as-deposited amorphous SnO2:NiO thin films. Compared with continuous SnO2:NiO thin film counterparts, these cross-linked films show the highest response of ~?9 to 50?ppm ethanol, low detection limits (
KeywordCross-linked SnO2:NiO network Self-assembly Gas sensor MEMS compatible Ethanol detection
WOS IDBMC:10.1186/s11671-020-3269-3
PublisherSpringer US
Citation statistics
Document Type期刊论文
Corresponding AuthorWang,Ying; Han,Ning
Recommended Citation
GB/T 7714
Tong,Weiguang,Wang,Ying,Bian,Yuzhi,et al. Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors[J]. Nanoscale Research Letters,2020,15(1).
APA Tong,Weiguang,Wang,Ying,Bian,Yuzhi,Wang,Anqi,Han,Ning,&Chen,Yunfa.(2020).Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors.Nanoscale Research Letters,15(1).
MLA Tong,Weiguang,et al."Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors".Nanoscale Research Letters 15.1(2020).
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Tong,Weiguang]'s Articles
[Wang,Ying]'s Articles
[Bian,Yuzhi]'s Articles
Baidu academic
Similar articles in Baidu academic
[Tong,Weiguang]'s Articles
[Wang,Ying]'s Articles
[Bian,Yuzhi]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Tong,Weiguang]'s Articles
[Wang,Ying]'s Articles
[Bian,Yuzhi]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.