CAS OpenIR
Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors
Tong,Weiguang1,2; Wang,Ying3; Bian,Yuzhi1; Wang,Anqi1; Han,Ning1,4; Chen,Yunfa1,4
2020-02-05
Source PublicationNanoscale Research Letters
ISSN1931-7573
Volume15Issue:1
AbstractAbstractNowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO2:NiO networks were successfully fabricated by sputtering SnO2:NiO target onto the etched self-assembled triangle polystyrene (PS) microsphere arrays and then ultrasonically removing the PS microsphere templates in acetone. The optimum line width (~?600?nm) and film thickness (~?50?nm) of SnO2:NiO networks were obtained by varying the plasma etching time and the sputtering time. Then, thermal annealing at 500?°C in H2 was implemented to activate and reorganize the as-deposited amorphous SnO2:NiO thin films. Compared with continuous SnO2:NiO thin film counterparts, these cross-linked films show the highest response of ~?9 to 50?ppm ethanol, low detection limits (
KeywordCross-linked SnO2:NiO network Self-assembly Gas sensor MEMS compatible Ethanol detection
DOI10.1186/s11671-020-3269-3
Language英语
WOS IDBMC:10.1186/s11671-020-3269-3
PublisherSpringer US
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/38265
Collection中国科学院过程工程研究所
Corresponding AuthorWang,Ying; Han,Ning
Affiliation1.
2.
3.
4.
Recommended Citation
GB/T 7714
Tong,Weiguang,Wang,Ying,Bian,Yuzhi,et al. Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors[J]. Nanoscale Research Letters,2020,15(1).
APA Tong,Weiguang,Wang,Ying,Bian,Yuzhi,Wang,Anqi,Han,Ning,&Chen,Yunfa.(2020).Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors.Nanoscale Research Letters,15(1).
MLA Tong,Weiguang,et al."Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors".Nanoscale Research Letters 15.1(2020).
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