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Aerosol assisted chemical vapour deposition of nanostructured ZnO thin films for NO2 and ethanol monitoring
Ding, Jian1; Chen, Shuqun1; Han, Ning2; Shi, Yi3; Hu, Peng1; Li, Hongyi1; Wang, Jinshu1
2020-07-01
Source PublicationCERAMICS INTERNATIONAL
ISSN0272-8842
Volume46Issue:10Pages:15152-15158
Abstract

Gas response control through structural and defect engineering in metal oxides are critical approaches to realize high performance sensors. Herein, we present the fabrication of ZnO thin films containing nanosized structures and high concentration of zinc interstitials for NO2 and ethanol monitoring. The target materials were fabricated by aerosol assisted chemical vapour deposition (AACVD) method on ceramic and glass substrates, and were characterized by complementary analytical techniques. The obtained ZnO nanoparticulate and nanopyramidal thin films yielded an outstanding response of similar to 41 to 1 ppm NO2 and similar to 236 towards 100 ppm ethanol, respectively. The reasons accounting for such an enhancement were revealed by the surface-depletion model in ZnO and the chemisorption energies of oxygen molecules on Zn-i-enriched crystal facets.

KeywordAacvd Zno Defects Sensors
DOI10.1016/j.ceramint.2020.03.051
Language英语
WOS KeywordGas-sensing Properties ; Metal-oxide Nanostructures ; Surface-area ; Sensors ; Temperature ; Size ; Nanoparticles ; Fabrication ; Nanosheets ; Substrate
Funding ProjectNational Natural Science Foundation of China[11575228] ; National Natural Science Foundation of China[91634118] ; National Natural Science Fund for Innovative Research Groups[51621003] ; Beijing Natural Science Foundation[2182010] ; Beijing Municipal High Level Innovative Team Building Program[IDHT20170502] ; Beijing Municipal Great Wall Scholar Training Plan Project[CITTCD20190307]
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Ceramics
Funding OrganizationNational Natural Science Foundation of China ; National Natural Science Fund for Innovative Research Groups ; Beijing Natural Science Foundation ; Beijing Municipal High Level Innovative Team Building Program ; Beijing Municipal Great Wall Scholar Training Plan Project
WOS IDWOS:000533511200094
PublisherELSEVIER SCI LTD
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/40801
Collection中国科学院过程工程研究所
Corresponding AuthorChen, Shuqun; Wang, Jinshu
Affiliation1.Beijing Univ Technol, Coll Mat Sci & Engn, Key Lab Adv Funct Mat, Educ Minist China, Beijing 100124, Peoples R China
2.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
3.Sunwoda Elect Co Ltd, Shenzhen 518108, Peoples R China
Recommended Citation
GB/T 7714
Ding, Jian,Chen, Shuqun,Han, Ning,et al. Aerosol assisted chemical vapour deposition of nanostructured ZnO thin films for NO2 and ethanol monitoring[J]. CERAMICS INTERNATIONAL,2020,46(10):15152-15158.
APA Ding, Jian.,Chen, Shuqun.,Han, Ning.,Shi, Yi.,Hu, Peng.,...&Wang, Jinshu.(2020).Aerosol assisted chemical vapour deposition of nanostructured ZnO thin films for NO2 and ethanol monitoring.CERAMICS INTERNATIONAL,46(10),15152-15158.
MLA Ding, Jian,et al."Aerosol assisted chemical vapour deposition of nanostructured ZnO thin films for NO2 and ethanol monitoring".CERAMICS INTERNATIONAL 46.10(2020):15152-15158.
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