Knowledge Management System Of Institute of process engineering,CAS
| Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors | |
| Wang, Y.1; Tong, W. G.2; Han, N.2 | |
| 2020-08-15 | |
| Source Publication | MATERIALS LETTERS
 |
| ISSN | 0167-577X |
| Volume | 273Pages:4 |
| Abstract | Here, we disclose the Pd-doped SnO2:NiO sensing films integrated on the microheaters by a facile co-sputtering method. The Pd content is controlled by the sputtering power, and thermal annealing at 500 degrees C in H-2 is implemented to activate the hybrid Pd/SnO2:NiO film. The 20 nm-thick Pd/SnO2:NiO films with Pd sputtering power of 20 W exhibits significantly enhanced ethanol sensing performance, with the response of 12 to 50 ppm ethanol, low detection limit of <5 ppm, high selectivity, good stability and low device-to-device variation of <15%. The gas sensing property enhancement can be predominantly attributed to the Schottky barrier at Pd-SnO2 interface and the Pd-induced catalytic oxidation of ethanol. These results enable the fabrication of wafer-scale micro ethanol gas sensors with low energy dissipation using the entire Micro-Electrical-Mechanical System (MEMS) strategy. (C) 2020 Elsevier B.V. All rights reserved. |
| Keyword | Pd/SnO2 NiO thin films Composite materials Sputtering Ethanol gas detection XPS MEMS gas sensor |
| DOI | 10.1016/j.matlet.2020.127924 |
| Language | 英语 |
| Funding Project | National Natural Science Foundation of China[51602314] |
| WOS Research Area | Materials Science ; Physics |
| WOS Subject | Materials Science, Multidisciplinary ; Physics, Applied |
| Funding Organization | National Natural Science Foundation of China |
| WOS ID | WOS:000538775600028 |
| Publisher | ELSEVIER |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ipe.ac.cn/handle/122111/41110 |
| Collection | 中国科学院过程工程研究所 |
| Corresponding Author | Wang, Y.; Han, N. |
| Affiliation | 1.Beijing Jiaotong Univ, Sch Sci, Dept Phys, Beijing 100044, Peoples R China 2.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China |
| Recommended Citation GB/T 7714 | Wang, Y.,Tong, W. G.,Han, N.. Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors[J]. MATERIALS LETTERS,2020,273:4. |
| APA | Wang, Y.,Tong, W. G.,&Han, N..(2020).Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors.MATERIALS LETTERS,273,4. |
| MLA | Wang, Y.,et al."Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors".MATERIALS LETTERS 273(2020):4. |
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