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Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma
Zhang, Haibao1; Yuan, Fangli2; Chen, Qiang1
2020-10-01
Source PublicationIEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN0093-3813
Volume48Issue:10Pages:3621-3628
AbstractThe atmospheric pressure radio frequency (RF) inductively coupled thermal plasma (ICTP) has been extensively used for many industrial processes. In order to understand the physical-chemical mechanism involved in the discharge process of ICTP, in situ optical emission spectroscopy (OES) was carried out to diagnose and determine the active particles and electron excitation temperature in this plasma. Several active particles such as Ar*, H-alpha, and H-beta were detected in the emission spectrum of Ar-H-2 ICTP. Based on the Boltzmann plot method, the electron excitation temperature and thermal efficiency of ICTP were evaluated. It was obtained that the electron excitation temperatures in Ar-H-2 ICTP varied from 9651.70 to 16691.91 K when the applied power was in the range of 8-15 kW, which was significantly higher than the electron excitation temperature in Ar ICTP at the same applied power. Besides, the thermal efficiency was enhanced from 17.19% for the Ar ICTP to 30.69% for the Ar-H-2 ICTP. These results may be beneficial for understanding of the discharge process in atmospheric pressure Ar-H-2 ICTP.
KeywordPlasma temperature Radio frequency Electron tubes Integrated optics Stimulated emission Hydrogen Diagnostics electron excitation temperature inductively coupled thermal plasma (ICTP) optical emission spectroscopy (OES) thermal efficiency
DOI10.1109/TPS.2020.3023689
Language英语
WOS KeywordBORON-NITRIDE NANOTUBES ; WALLED CARBON NANOTUBES ; SCALE PRODUCTION ; HYDROGEN ; ARGON ; AR ; TEMPERATURE ; TECHNOLOGY ; PYROLYSIS ; PROBES
Funding ProjectNational Natural Science Foundation of China (NSFC)[11505013] ; National Natural Science Foundation of China (NSFC)[11875090] ; Natural Science Foundation of Beijing Municipality[1192008] ; Beijing Municipal Excellent Talents Foundation[2016000026833ZK12] ; Project of Beijing Municipal Commission of Education[KM202010015003]
WOS Research AreaPhysics
WOS SubjectPhysics, Fluids & Plasmas
Funding OrganizationNational Natural Science Foundation of China (NSFC) ; Natural Science Foundation of Beijing Municipality ; Beijing Municipal Excellent Talents Foundation ; Project of Beijing Municipal Commission of Education
WOS IDWOS:000577555000042
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Document Type期刊论文
Identifierhttp://ir.ipe.ac.cn/handle/122111/42463
Collection中国科学院过程工程研究所
Corresponding AuthorChen, Qiang
Affiliation1.Beijing Inst Graph Commun, Lab Plasma Phys & Mat, Beijing 102600, Peoples R China
2.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Haibao,Yuan, Fangli,Chen, Qiang. Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2020,48(10):3621-3628.
APA Zhang, Haibao,Yuan, Fangli,&Chen, Qiang.(2020).Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma.IEEE TRANSACTIONS ON PLASMA SCIENCE,48(10),3621-3628.
MLA Zhang, Haibao,et al."Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma".IEEE TRANSACTIONS ON PLASMA SCIENCE 48.10(2020):3621-3628.
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