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Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma | |
Zhang, Haibao1; Yuan, Fangli2; Chen, Qiang1 | |
2020-10-01 | |
Source Publication | IEEE TRANSACTIONS ON PLASMA SCIENCE
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ISSN | 0093-3813 |
Volume | 48Issue:10Pages:3621-3628 |
Abstract | The atmospheric pressure radio frequency (RF) inductively coupled thermal plasma (ICTP) has been extensively used for many industrial processes. In order to understand the physical-chemical mechanism involved in the discharge process of ICTP, in situ optical emission spectroscopy (OES) was carried out to diagnose and determine the active particles and electron excitation temperature in this plasma. Several active particles such as Ar*, H-alpha, and H-beta were detected in the emission spectrum of Ar-H-2 ICTP. Based on the Boltzmann plot method, the electron excitation temperature and thermal efficiency of ICTP were evaluated. It was obtained that the electron excitation temperatures in Ar-H-2 ICTP varied from 9651.70 to 16691.91 K when the applied power was in the range of 8-15 kW, which was significantly higher than the electron excitation temperature in Ar ICTP at the same applied power. Besides, the thermal efficiency was enhanced from 17.19% for the Ar ICTP to 30.69% for the Ar-H-2 ICTP. These results may be beneficial for understanding of the discharge process in atmospheric pressure Ar-H-2 ICTP. |
Keyword | Plasma temperature Radio frequency Electron tubes Integrated optics Stimulated emission Hydrogen Diagnostics electron excitation temperature inductively coupled thermal plasma (ICTP) optical emission spectroscopy (OES) thermal efficiency |
DOI | 10.1109/TPS.2020.3023689 |
Language | 英语 |
WOS Keyword | BORON-NITRIDE NANOTUBES ; WALLED CARBON NANOTUBES ; SCALE PRODUCTION ; HYDROGEN ; ARGON ; AR ; TEMPERATURE ; TECHNOLOGY ; PYROLYSIS ; PROBES |
Funding Project | National Natural Science Foundation of China (NSFC)[11505013] ; National Natural Science Foundation of China (NSFC)[11875090] ; Natural Science Foundation of Beijing Municipality[1192008] ; Beijing Municipal Excellent Talents Foundation[2016000026833ZK12] ; Project of Beijing Municipal Commission of Education[KM202010015003] |
WOS Research Area | Physics |
WOS Subject | Physics, Fluids & Plasmas |
Funding Organization | National Natural Science Foundation of China (NSFC) ; Natural Science Foundation of Beijing Municipality ; Beijing Municipal Excellent Talents Foundation ; Project of Beijing Municipal Commission of Education |
WOS ID | WOS:000577555000042 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.ipe.ac.cn/handle/122111/42463 |
Collection | 中国科学院过程工程研究所 |
Corresponding Author | Chen, Qiang |
Affiliation | 1.Beijing Inst Graph Commun, Lab Plasma Phys & Mat, Beijing 102600, Peoples R China 2.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China |
Recommended Citation GB/T 7714 | Zhang, Haibao,Yuan, Fangli,Chen, Qiang. Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2020,48(10):3621-3628. |
APA | Zhang, Haibao,Yuan, Fangli,&Chen, Qiang.(2020).Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma.IEEE TRANSACTIONS ON PLASMA SCIENCE,48(10),3621-3628. |
MLA | Zhang, Haibao,et al."Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma".IEEE TRANSACTIONS ON PLASMA SCIENCE 48.10(2020):3621-3628. |
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