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Electrophoretic deposition of metal oxide films aimed for gas sensors application: The role of anodic aluminum oxide (AAO)/Al composite structure
Han, Ning1,2; Deng, Pingye3; Chen, Jiangchao1,2; Chai, Linyu1,2; Gao, Hongshuai1,2; Chen, Yunfa1; Chen, YF
2010-01-29
Source PublicationSENSORS AND ACTUATORS B-CHEMICAL
ISSN0925-4005
Volume144Issue:1Pages:267-273
AbstractAnodic aluminum oxide (AAC)/Al composite structure was prepared and used to fabricate metal oxide gas sensing film through electrophoretic deposition (EPD) process, and Ga-doped ZnO (GZO) and GZO post-treated in H(2) (GZO-H) were used as high resistance and low resistance metal oxide models. The results showed that, in EPD process, Al (residual All after anodic oxidation) plays as the electrode with the electric field penetrating the pores of AAO. And dispersant Such as alcohols were preferred as H(2) would be produced on the AAO/Al electrode in aqueous dispersion, which destroyed both the AAO layer and the GZO (or GZO-H) him. While in the gas sensing process, AAO (AAO layer) plays as the insulative layer between GZO (or GZO-H) film and Al Substrate. The thickness of AAO layer should be properly tailored (i.e. >80 mu m) as to make its resistance far larger than that of the GZO film, which prevents the current leakage from the GZO film to the Al substrate. While the thickness can be 10 mu m when GZO-H film was used as its resistance is smaller. The AAO/Al composite structure made the EPD process feasible for gas sensing film fabrication, without any further treatment, which showed prospect in fabrication of metal oxide semiconductor gas sensors. (C) 2009 Elsevier B.V. All rights reserved.
KeywordAnodic Aluminum Oxide Composite Structure Electrophoretic Deposition Gas Sensor Resistance
SubtypeArticle
WOS HeadingsScience & Technology ; Physical Sciences ; Technology
DOI10.1016/j.snb.2009.10.068
Indexed BySCI
Language英语
WOS KeywordSENSING PROPERTIES ; HARD ANODIZATION ; THIN-FILMS ; FABRICATION ; CERAMICS ; SENSITIVITY ; NANOTUBES ; MECHANISM ; MEMBRANES ; GROWTH
WOS Research AreaChemistry ; Electrochemistry ; Instruments & Instrumentation
WOS SubjectChemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS IDWOS:000274947800042
Citation statistics
Cited Times:9[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Version出版稿
Identifierhttp://ir.ipe.ac.cn/handle/122111/6223
Collection多相复杂系统国家重点实验室
Corresponding AuthorChen, YF
Affiliation1.Chinese Acad Sci, State Key Lab Multiphase Complex Syst, Inst Proc Engn, Beijing 100190, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
3.Beijing Ctr Phys & Chem Anal, Beijing 100089, Peoples R China
Recommended Citation
GB/T 7714
Han, Ning,Deng, Pingye,Chen, Jiangchao,et al. Electrophoretic deposition of metal oxide films aimed for gas sensors application: The role of anodic aluminum oxide (AAO)/Al composite structure[J]. SENSORS AND ACTUATORS B-CHEMICAL,2010,144(1):267-273.
APA Han, Ning.,Deng, Pingye.,Chen, Jiangchao.,Chai, Linyu.,Gao, Hongshuai.,...&Chen, YF.(2010).Electrophoretic deposition of metal oxide films aimed for gas sensors application: The role of anodic aluminum oxide (AAO)/Al composite structure.SENSORS AND ACTUATORS B-CHEMICAL,144(1),267-273.
MLA Han, Ning,et al."Electrophoretic deposition of metal oxide films aimed for gas sensors application: The role of anodic aluminum oxide (AAO)/Al composite structure".SENSORS AND ACTUATORS B-CHEMICAL 144.1(2010):267-273.
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