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Improving humidity selectivity in formaldehyde gas sensing by a two-sensor array made of Ga-doped ZnO
Han, Ning1,2; Tian, Yajun1; Wu, Xiaofeng1,2; Chen, Yunfa1; Chen, YF
2009-04-24
Source PublicationSENSORS AND ACTUATORS B-CHEMICAL
ISSN0925-4005
Volume138Issue:1Pages:228-235
AbstractA two-sensor array was fabricated to improve gas selectivity, an intrinsic disadvantage of mono-metal oxide semiconductor gas sensor. The sensors comprising the array were made of Ga-doped ZnO (GZO) annealed at different temperatures, and the selectivity over relative humidity (RH 0-70 +/- 10%) was greatly improved in formaldehyde gas sensing. The physical and mathematical principle for high selectivity is based on the different responses of the two sensors to analyte (formaldehyde) and to interferent (RH), that is. one sensor has larger response to formaldehyde than the other but the same response to RH. But under the same fabrication process for ZnO without Ga dopant, one sensor was insensitive either to formaldehyde or to RH due to the reaction of ZnO with the SiO(2) substrate. Consequently, such a sensor array cannot be fabricated using ZnO sensors without Ga dopant. Possible mechanism concerning interactions between GZO and the two gases (formaldehyde and water vapor) was discussed. (C) 2009 Elsevier B.V. All rights reserved.
KeywordSensor Array Selectivity Ga-doped Zno Formaldehyde Relative Humidity
SubtypeArticle
WOS HeadingsScience & Technology ; Physical Sciences ; Technology
DOI10.1016/j.snb.2009.01.054
Indexed BySCI
Language英语
WOS KeywordZINC-OXIDE ; SENSOR ; CERAMICS ; FILMS ; WATER ; SENSITIVITY ; FABRICATION ; PARTICLES ; ETHANOL ; OXYGEN
WOS Research AreaChemistry ; Electrochemistry ; Instruments & Instrumentation
WOS SubjectChemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS IDWOS:000265656300036
Citation statistics
Cited Times:105[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Version出版稿
Identifierhttp://ir.ipe.ac.cn/handle/122111/6681
Collection多相复杂系统国家重点实验室
Corresponding AuthorChen, YF
Affiliation1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
Recommended Citation
GB/T 7714
Han, Ning,Tian, Yajun,Wu, Xiaofeng,et al. Improving humidity selectivity in formaldehyde gas sensing by a two-sensor array made of Ga-doped ZnO[J]. SENSORS AND ACTUATORS B-CHEMICAL,2009,138(1):228-235.
APA Han, Ning,Tian, Yajun,Wu, Xiaofeng,Chen, Yunfa,&Chen, YF.(2009).Improving humidity selectivity in formaldehyde gas sensing by a two-sensor array made of Ga-doped ZnO.SENSORS AND ACTUATORS B-CHEMICAL,138(1),228-235.
MLA Han, Ning,et al."Improving humidity selectivity in formaldehyde gas sensing by a two-sensor array made of Ga-doped ZnO".SENSORS AND ACTUATORS B-CHEMICAL 138.1(2009):228-235.
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