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陶瓷薄膜制备及应用
卢旭晨; 李佑楚; 韩铠; 王风鸣
1999
Source Publication材料导报
Issue06Pages:35-38
Abstract对各种薄膜制备方法的特点(即物理方法、化学方法)进行阐述,并且从氧化物和非氧化物的角度,综述了陶瓷薄膜作为硬质薄膜、气敏薄膜以及铁电、压电等微电子薄膜的应用。
Keyword陶瓷薄膜 制备 应用
Document Type期刊论文
Version出版稿
Identifierhttp://ir.ipe.ac.cn/handle/122111/7424
Collection研究所(批量导入)
Recommended Citation
GB/T 7714
卢旭晨,李佑楚,韩铠,等. 陶瓷薄膜制备及应用[J]. 材料导报,1999(06):35-38.
APA 卢旭晨,李佑楚,韩铠,&王风鸣.(1999).陶瓷薄膜制备及应用.材料导报(06),35-38.
MLA 卢旭晨,et al."陶瓷薄膜制备及应用".材料导报 .06(1999):35-38.
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