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Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts 期刊论文
APPLIED SURFACE SCIENCE, 2016, 卷号: 360, 期号: JAN, 页码: 192-197
Authors:  Ren, Wenfeng;  Wang, Yanhong;  Zhang, Zailei;  Tan, Qiangqiang;  Zhong, Ziyi;  Su, Fabing
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Si Wafers  Direct-pattern  Rochow Reaction  Copper Catalysts  Ch3cl